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Nanoplus was founded in 1998 as a spin-off from the department of
Technical Physics at Würzburg University to transfer research results
into applications and products with a specialization in optoelectronics
devices and customer specific micro- and nano-structuring.
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The company is equipped with a complete process line for semiconductorlaser fabrication, comprising different dry etch systems, sputter
systems, evaporators, mask aligners, laser mounting facilities, etc. in
a 250 m2 clean room (class 100-10000).
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DFB lasers realized by thistechnique have a high single mode yield, high efficiencies as well as
high sidemode supression ratio (SMSR) around 40dB combined with low
back reflection sensitivity and thresholds. The technology has been
optimized for a wide variety of semiconductor heterostructures
including GaSb, InP and GaAs based materials.
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